Method and system for high power reflective optical elements

Demos, Stavros G.; Rubenchik, Alexander M.; Negres, Raluca A.

Title: Method and system for high power reflective optical elements

Patent · Tue Mar 12 00:00:00 EDT 2013

OSTI ID:1083050

Demos, Stavros G.; Rubenchik, Alexander M.; Negres, Raluca A.

A method of repairing damage in an optical element includes providing a laser system including at least one optical element having a coating layer having an incident light surface and directing a laser pulse from the laser system to impinge on the incident light surface. The method also includes sustaining damage to a portion of the incident light surface and melting the damaged portion of the incident light surface and a region adjacent to the damaged portion. The method further includes flowing material from the region adjacent the damaged portion to the damaged portion and solidifying the material in the damaged portion and the region adjacent to the damaged portion.

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Research Organization:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC52-07NA27344

Assignee:: Lawrence Livermore National Security, LLC (Livermore, CA)

Patent Number(s):: 8,395,079

Application Number:: 12/834,706

OSTI ID:: 1083050

Country of Publication:: United States

Language:: English

References (7)

Q-switched frequency-doubled Nd:YAG laser surface finishing of metals Draper, Clifton W.; Holliday, Albert Applied Optics, Vol. 22, Issue 17 https://doi.org/10.1364/AO.22.002521	journal	January 1983
Radiation system and lithographic apparatus Van Herpen, Maarten Marinus Johannes Wilhelmus; Banine, Vadim Yevgenyevich; Wassink, Arnoud Cornelis https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7233010 US Patent Document 7,233,010	patent	June 2007
High Power Laser Incorporating Self-Healing Mirror Means Haddad, Theodore A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/3371287 US Patent Document 3371287	patent	February 1968
Method and Apparatus for Repair of Reflective Photomasks Haight, Richard; Longo, Peter; Wagner, Alfred https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060243712 US Patent Document 11/458161; 20060243712	patent-application	November 2006
Laser planarization of nonrefractory metal during integrated circuit fabrication Magee, Thomas J.; Osborne, Joel; Gildea, Peter https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4758533 US Patent Document 4,758,533	patent	July 1988
Contact and omnidirectional reflective mirror for flip chipped light emitting devices Sun, Decai https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7274040 US Patent Document 7,274,040	patent	September 2007
LPP EUV light source drive laser system Ershov, Alexander I.; Bykanov, Alexander N.; Khodykin, Oleh https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7482609 US Patent Document 7,482,609	patent	January 2009

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