Conformal coating of highly structured surfaces
Abstract
Method of applying a conformal coating to a highly structured substrate and devices made by the disclosed methods are disclosed. An example method includes the deposition of a substantially contiguous layer of a material upon a highly structured surface within a deposition process chamber. The highly structured surface may be associated with a substrate or another layer deposited on a substrate. The method includes depositing a material having an amorphous structure on the highly structured surface at a deposition pressure of equal to or less than about 3 mTorr. The method may also include removing a portion of the amorphous material deposited on selected surfaces and depositing additional amorphous material on the highly structured surface.
- Inventors:
- Publication Date:
- Research Org.:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1082450
- Patent Number(s):
- 8,329,502
- Application Number:
- 12/904,959
- Assignee:
- Alliance for Sustainable Energy, LLC (Golden, CO)
- DOE Contract Number:
- AC36-08GO28308
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Ginley, David S., Perkins, John, Berry, Joseph, and Gennett, Thomas. Conformal coating of highly structured surfaces. United States: N. p., 2012.
Web.
Ginley, David S., Perkins, John, Berry, Joseph, & Gennett, Thomas. Conformal coating of highly structured surfaces. United States.
Ginley, David S., Perkins, John, Berry, Joseph, and Gennett, Thomas. 2012.
"Conformal coating of highly structured surfaces". United States. https://www.osti.gov/servlets/purl/1082450.
@article{osti_1082450,
title = {Conformal coating of highly structured surfaces},
author = {Ginley, David S. and Perkins, John and Berry, Joseph and Gennett, Thomas},
abstractNote = {Method of applying a conformal coating to a highly structured substrate and devices made by the disclosed methods are disclosed. An example method includes the deposition of a substantially contiguous layer of a material upon a highly structured surface within a deposition process chamber. The highly structured surface may be associated with a substrate or another layer deposited on a substrate. The method includes depositing a material having an amorphous structure on the highly structured surface at a deposition pressure of equal to or less than about 3 mTorr. The method may also include removing a portion of the amorphous material deposited on selected surfaces and depositing additional amorphous material on the highly structured surface.},
doi = {},
url = {https://www.osti.gov/biblio/1082450},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 11 00:00:00 EST 2012},
month = {Tue Dec 11 00:00:00 EST 2012}
}
Works referenced in this record:
Humidity-resistant high-conductivity amorphous-InZnO transparent conductors
conference, June 2009
- Gennett, Thomas; Gillaspie, Dane T.; Reese, Matthew O.
- 2009 34th IEEE Photovoltaic Specialists Conference (PVSC)