skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Conformal coating of highly structured surfaces

Abstract

Method of applying a conformal coating to a highly structured substrate and devices made by the disclosed methods are disclosed. An example method includes the deposition of a substantially contiguous layer of a material upon a highly structured surface within a deposition process chamber. The highly structured surface may be associated with a substrate or another layer deposited on a substrate. The method includes depositing a material having an amorphous structure on the highly structured surface at a deposition pressure of equal to or less than about 3 mTorr. The method may also include removing a portion of the amorphous material deposited on selected surfaces and depositing additional amorphous material on the highly structured surface.

Inventors:
; ; ;
Publication Date:
Research Org.:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1082450
Patent Number(s):
8,329,502
Application Number:
12/904,959
Assignee:
Alliance for Sustainable Energy, LLC (Golden, CO)
DOE Contract Number:  
AC36-08GO28308
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Ginley, David S., Perkins, John, Berry, Joseph, and Gennett, Thomas. Conformal coating of highly structured surfaces. United States: N. p., 2012. Web.
Ginley, David S., Perkins, John, Berry, Joseph, & Gennett, Thomas. Conformal coating of highly structured surfaces. United States.
Ginley, David S., Perkins, John, Berry, Joseph, and Gennett, Thomas. 2012. "Conformal coating of highly structured surfaces". United States. https://www.osti.gov/servlets/purl/1082450.
@article{osti_1082450,
title = {Conformal coating of highly structured surfaces},
author = {Ginley, David S. and Perkins, John and Berry, Joseph and Gennett, Thomas},
abstractNote = {Method of applying a conformal coating to a highly structured substrate and devices made by the disclosed methods are disclosed. An example method includes the deposition of a substantially contiguous layer of a material upon a highly structured surface within a deposition process chamber. The highly structured surface may be associated with a substrate or another layer deposited on a substrate. The method includes depositing a material having an amorphous structure on the highly structured surface at a deposition pressure of equal to or less than about 3 mTorr. The method may also include removing a portion of the amorphous material deposited on selected surfaces and depositing additional amorphous material on the highly structured surface.},
doi = {},
url = {https://www.osti.gov/biblio/1082450}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 11 00:00:00 EST 2012},
month = {Tue Dec 11 00:00:00 EST 2012}
}

Works referenced in this record:

Humidity-resistant high-conductivity amorphous-InZnO transparent conductors
conference, June 2009