Substrate comprising a nanometer-scale projection array
Patent
·
OSTI ID:1080290
A method for forming a substrate comprising nanometer-scale pillars or cones that project from the surface of the substrate is disclosed. The method enables control over physical characteristics of the projections including diameter, sidewall angle, and tip shape. The method further enables control over the arrangement of the projections including characteristics such as center-to-center spacing and separation distance.
- Research Organization:
- The Board of Trustees of the Leland Stanford Junior University
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- FG36-08GOI8004
- Assignee:
- The Board of Trustees of the Leland Stanford Junior University (Palo Alto, CA)
- Patent Number(s):
- 8,318,604
- Application Number:
- 12/948,025
- OSTI ID:
- 1080290
- Country of Publication:
- United States
- Language:
- English
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