Specular and diffuse x-ray scattering from tungsten/carbon multilayers having a high reflectivity at 10 keV.
X-ray scattering measurements at 10 keV from multilayers having a period of 24.8 {angstrom} and consisting of 100 W/C bilayers are reported. Specular scans revealed first order reflectivities in the range 73.5% to 78.0% with bandpasses in the range of 1.5% to 1.7%. Total roughness (or interface grading) values deduced from fitting were in the range 2.5 to 3.0 for the last-to-grow surface of the W layers. Diffuse scattering measurements were made in a novel geometry that permitted investigation of in-plane momentum transfers up to 0.2 {angstrom}{sup {minus}1}. This is roughly an order of magnitude larger than is possible in conventional rocking scans. A power law dependence of the diffuse scattering after integration over a ''Brillioun zone'' is found. The exponent of this power law, 1.75, when interpreted using a logarithmic correlation function leads to a value of 1.0 {angstrom} for the correlated roughness.
- Research Organization:
- Argonne National Lab., IL (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 10685
- Report Number(s):
- ANL/XFD/CP-95865; TRN: AH200127%%271
- Resource Relation:
- Conference: SPIE's 1998 Annual Meeting, San Diego, CA (US), 07/19/1998--07/24/1998; Other Information: PBD: 10 Sep 1998
- Country of Publication:
- United States
- Language:
- English
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