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Title: SiC Power MOSFET with Improved Gate Dielectric

Technical Report ·
DOI:https://doi.org/10.2172/1067486· OSTI ID:1067486

In this STTR program, Structured Materials Industries (SMI), and Cornell University are developing novel gate oxide technology, as a critical enabler for silicon carbide (SiC) devices. SiC is a wide bandgap semiconductor material, with many unique properties. SiC devices are ideally suited for high-power, highvoltage, high-frequency, high-temperature and radiation resistant applications. The DOE has expressed interest in developing SiC devices for use in extreme environments, in high energy physics applications and in power generation. The development of transistors based on the Metal Oxide Semiconductor Field Effect Transistor (MOSFET) structure will be critical to these applications.

Research Organization:
Structured Materials Industries, Inc., Piscataway, NJ (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
DOE Contract Number:
FG02-06ER86288
OSTI ID:
1067486
Report Number(s):
DOE-STRUCTURED MATERIALS-ER86288
Country of Publication:
United States
Language:
English