U.S. Department of EnergyOffice of Scientific and Technical Information
Three-dimensional metamaterials
Abstract
A fabrication method is capable of creating canonical metamaterial structures arrayed in a three-dimensional geometry. The method uses a membrane suspended over a cavity with predefined pattern as a directional evaporation mask. Metallic and/or dielectric material can be evaporated at high vacuum through the patterned membrane to deposit resonator structures on the interior walls of the cavity, thereby providing a unit cell of micron-scale dimension. The method can produce volumetric metamaterial structures comprising layers of such unit cells of resonator structures.
- Inventors:
-
- Albuquerque, NM
- Publication Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1055696
- Patent Number(s):
- 8,197,887
- Application Number:
- 12/512,082
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Burckel, David Bruce. Three-dimensional metamaterials. United States: N. p., 2012.
Web.
Burckel, David Bruce. Three-dimensional metamaterials. United States.
Burckel, David Bruce. 2012.
"Three-dimensional metamaterials". United States. https://www.osti.gov/servlets/purl/1055696.
@article{osti_1055696,
title = {Three-dimensional metamaterials},
author = {Burckel, David Bruce},
abstractNote = {A fabrication method is capable of creating canonical metamaterial structures arrayed in a three-dimensional geometry. The method uses a membrane suspended over a cavity with predefined pattern as a directional evaporation mask. Metallic and/or dielectric material can be evaporated at high vacuum through the patterned membrane to deposit resonator structures on the interior walls of the cavity, thereby providing a unit cell of micron-scale dimension. The method can produce volumetric metamaterial structures comprising layers of such unit cells of resonator structures.},
doi = {},
url = {https://www.osti.gov/biblio/1055696},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 12 00:00:00 EDT 2012},
month = {Tue Jun 12 00:00:00 EDT 2012}
}
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