Real space soft x-ray imaging at 10 nm spatial resolution
Journal Article
·
· Optics Express
OSTI ID:1050646
Using Fresnel zone plates made with our robust nanofabrication processes, we have successfully achieved 10 nm spatial resolution with soft x-ray microscopy. The result, obtained with both a conventional full-field and scanning soft x-ray microscope, marks a significant step forward in extending the microscopy to truly nanoscale studies.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- Materials Sciences Division
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 1050646
- Report Number(s):
- LBNL-4804E; TRN: US201218%%858
- Journal Information:
- Optics Express, Vol. 20, Issue 9
- Country of Publication:
- United States
- Language:
- English
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