Methods and systems for positioning micro elements
Abstract
A micro device may comprise a substrate, a first micro structure coupled to the substrate, a second micro structure coupled to the substrate, and port configured to receive an input. The first micro structure is configured to move into engagement with the second micro structure in response to the input.
- Inventors:
- Publication Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1039748
- Patent Number(s):
- 8,134,276
- Application Number:
- 11/757,343
- Assignee:
- MicroZeus, LLC (Dallas, TX)
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Stalford, Harold L. Methods and systems for positioning micro elements. United States: N. p., 2012.
Web.
Stalford, Harold L. Methods and systems for positioning micro elements. United States.
Stalford, Harold L. 2012.
"Methods and systems for positioning micro elements". United States. https://www.osti.gov/servlets/purl/1039748.
@article{osti_1039748,
title = {Methods and systems for positioning micro elements},
author = {Stalford, Harold L.},
abstractNote = {A micro device may comprise a substrate, a first micro structure coupled to the substrate, a second micro structure coupled to the substrate, and port configured to receive an input. The first micro structure is configured to move into engagement with the second micro structure in response to the input.},
doi = {},
url = {https://www.osti.gov/biblio/1039748},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 13 00:00:00 EDT 2012},
month = {Tue Mar 13 00:00:00 EDT 2012}
}
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