A syncopated leap-frog algorithm for orbit consistent plasma simulation of materials processing reactors

Conference · Sat Oct 01 00:00:00 EDT 1994

OSTI ID:10188711

Cobb, J W; Leboeuf, J N

The authors present a particle algorithm to extend simulation capabilities for plasma based materials processing reactors. The orbit integrator uses a syncopated leap-frog algorithm in cylindrical coordinates, which maintains second order accuracy, and minimizes computational complexity. Plasma source terms are accumulated orbit consistently directly in the frequency and azimuthal mode domains. Finally they discuss the numerical analysis of this algorithm. Orbit consistency greatly reduces the computational cost for a given level of precision. The computational cost is independent of the degree of time scale separation.

• Research Organization: Oak Ridge National Lab., TN (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC05-84OR21400
• OSTI ID: 10188711
• Report Number(s): CONF-9409105-4; ON: DE95000954; TRN: 94:021032
• Resource Relation: Conference: 15. international conference on the numerical simulation of plasmas,Valley Forge, PA (United States),7-9 Sep 1994; Other Information: PBD: [1994]
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
REACTION KINETICS
COMPUTERIZED SIMULATION
ALGORITHMS
SEMICONDUCTOR MATERIALS
PROCESSING
PLASMA
360601
PREPARATION AND MANUFACTURE