Filtered cathodic arc source
Abstract
Disclosed is a continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45{degrees} to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles.
- Inventors:
- Publication Date:
- Research Org.:
- Lawrence Livermore National Lab., CA (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 10172067
- Patent Number(s):
- PATENTS-US-A7921780
- Application Number:
- ON: DE94016128; PAN: 7-921,780
- Assignee:
- Dept. of Energy
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent Application
- Resource Relation:
- Other Information: PBD: 1992
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ION SOURCES; DESIGN; ELECTRIC ARCS; MAGNETIC FIELDS; FILTERS; SOLENOIDS; 661220; PARTICLE BEAM PRODUCTION AND HANDLING; TARGETS
Citation Formats
Falabella, S, and Sanders, D M. Filtered cathodic arc source. United States: N. p., 1992.
Web.
Falabella, S, & Sanders, D M. Filtered cathodic arc source. United States.
Falabella, S, and Sanders, D M. 1992.
"Filtered cathodic arc source". United States. https://www.osti.gov/servlets/purl/10172067.
@article{osti_10172067,
title = {Filtered cathodic arc source},
author = {Falabella, S and Sanders, D M},
abstractNote = {Disclosed is a continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45{degrees} to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles.},
doi = {},
url = {https://www.osti.gov/biblio/10172067},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Dec 31 00:00:00 EST 1992},
month = {Thu Dec 31 00:00:00 EST 1992}
}