Totem pole drive decks for the high-voltage, pulsed-power modulator for a large-scale plasma source ion implantation system
Plasma source ion implantation (PSII) is an industrially-relevant technique to change the surface composition of materials, thereby improving the mechanical, chemical, electrical, or optical properties. Pre-manufactured parts are immersed in a plasma and are pulsed with a high voltage source that accelerates the ions to the surface, where they become implanted, modifying the surface characteristics. The high voltage applied to the ``workpiece`` is supplied by a high-voltage, pulsed-power modulator capable of operating to 120 kV, with an output pulse width to 20 uS at a repetition rate of up to 2 kHz. Output currents of up to 60 A, and average powers of 225 kW (6.6 MW peak) will be the ultimate capability. Initial system start-up will be limited by a 60 kV, 1 A charging power supply. This paper describes the totem pole drive decks, the ``on`` deck and ``off`` deck, used as a pre-driver to the main high voltage switch tubes which applies power to the workpiece. The pulse length and frequency are externally controlled and then fiber-optically coupled to the modulator totem pole drive decks. The circuitry of the planar triode drivers will be presented in addition to experimental results.
- Research Organization:
- Los Alamos National Lab., NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-36
- OSTI ID:
- 10165837
- Report Number(s):
- LA-UR-93-2299; CONF-930616-8; ON: DE93016468
- Resource Relation:
- Conference: 9. IEEE pulsed power conference,Albuquerque, NM (United States),21-23 Jun 1993; Other Information: PBD: [1993]
- Country of Publication:
- United States
- Language:
- English
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