Specifying the surface finish of x-ray mirrors

Conference · Fri Dec 31 00:00:00 EST 1993

OSTI ID:10159005

Church, E L ^[1]; Takacs, P Z ^[2]

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1. Army Armament Research and Development Command, Dover, NJ (United States)
2. Brookhaven National Lab., Upton, NY (United States)

Our measurements of x-ray mirrors at Brookhaven indicate that the power spectral densities of their finish errors have inverse power-law or fractal forms, rather than being flat at low frequencies as is usually assumed. This paper reviews these data and discusses how this apparent divergent behavior leads to finite but unconventional effects in imaging. Results are then used to develop more rational and realistic surface-finish specifications.

• Research Organization: Brookhaven National Lab., Upton, NY (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC02-76CH00016
• OSTI ID: 10159005
• Report Number(s): BNL-60378; CONF-9305159-10; ON: DE94013537
• Resource Relation: Conference: Optical Society of America (OSA) topical meeting on soft x-ray projection lithography,Monterey, CA (United States),10-12 May 1993; Other Information: PBD: [1993]
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
MIRRORS
SURFACE FINISHING
IMAGES
X RADIATION
426000
COMPONENTS
ELECTRON DEVICES AND CIRCUITS