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Title: Edge-on ion irradiation of electron microscope specimens

Conference ·
OSTI ID:10154059
 [1];  [1]
  1. Argonne National Lab., IL (United States)

A special technique is described for in situ transmission electron microscope (TEM) experiments involving simultaneous ion irradiation, in which the resultant phenomena are observed as in a cross-section TEM specimen. That is, instead of ion-irradiating the film or foil specimen normal to the major surfaces and observing in plan view (i.e., in the same direction), the specimen is irradiated edge-on (i.e., parallel to the major surfaces) and is observed normal to the depth direction with respect to the irradiation. The results of amorphization of Si, irradiated in this orientation by 1 or 1.5 MeV Kr, are presented and briefly compared with the usual plan view observations. The limitations of the technique are discussed and several experiments which might profitably employ this technique are suggested.

Research Organization:
Argonne National Lab., IL (United States)
Sponsoring Organization:
USDOE, Washington, DC (United States)
DOE Contract Number:
W-31109-ENG-38
OSTI ID:
10154059
Report Number(s):
ANL/CP-74821; CONF-920402-25; ON: DE92014847
Resource Relation:
Conference: 1992 Material Research Society (MRS) spring meeting,San Francisco, CA (United States),27 Apr - 2 May 1992; Other Information: PBD: [1992]
Country of Publication:
United States
Language:
English