Compilation of diamond-like carbon properties for barriers and hard coatings

Technical Report · Sun May 01 00:00:00 EDT 1994

DOI:https://doi.org/10.2172/10151476· OSTI ID:10151476

Outka, D A; Hsu, Wen L; Phillips, K; Boehme, D R; Yang, N Y.C.; Ottesen, D K; Johnsen, H A; Clift, W M ^[1]; Headley, T J ^[2]

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1. Sandia National Labs., Livermore, CA (United States)
2. Sandia National Labs., Albuquerque, NM (United States)

Diamond-like carbon (DLC) is an amorphous form of carbon which resembles diamond in its hardness, lubricity, and resistance to chemical attack. Such properties make DLC of interest for use in barrier and hard coating technology. This report examines a variety of properties of DLC coatings. This includes examining substrates on which DLC coatings can be deposited; the resistance of DLC coatings to various chemical agents; adhension of DLC coatings; and characterization of DLC coatings by electron microscopy, FTIR, sputter depth profiling, stress measurements and nanoindentation.

• Research Organization: Sandia National Lab. (SNL-CA), Livermore, CA (United States); Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-76DR00789
• OSTI ID: 10151476
• Report Number(s): SAND-94-8219B; ON: DE94012139
• Resource Relation: Other Information: PBD: May 1994
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CARBON
PHYSICAL PROPERTIES
AMORPHOUS STATE
PROTECTIVE COATINGS
HARD FACING
DEPOSITION
360601
360606
360603
PREPARATION AND MANUFACTURE
MECHANICAL PROPERTIES