Mesoscale hybrid calibration artifact
Patent
·
OSTI ID:1014662
- Albuquerque, NM
- Waltham, MA
A mesoscale calibration artifact, also called a hybrid artifact, suitable for hybrid dimensional measurement and the method for make the artifact. The hybrid artifact has structural characteristics that make it suitable for dimensional measurement in both vision-based systems and touch-probe-based systems. The hybrid artifact employs the intersection of bulk-micromachined planes to fabricate edges that are sharp to the nanometer level and intersecting planes with crystal-lattice-defined angles.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- 7,788,818
- Application Number:
- US Patent Application 11/866,177
- OSTI ID:
- 1014662
- Country of Publication:
- United States
- Language:
- English
Grid plate calibration at the National Bureau of Standards
|
journal | January 1988 |
Large batch dimensional metrology demonstrated in the example of a LIGA fabricated spring
|
journal | April 2005 |
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