Network analyzer calibration for cryogenic on-wafer measurements

Conference · Fri Apr 01 00:00:00 EST 1994

OSTI ID:10142735

Hietala, V M; Housel, M S; Caldwell, R B

A cryogenic probe station for on-wafer microwave measurements has been developed at Sandia National Laboratories to explore the basic device physics and characterize advanced components for low-temperature applications. The station was designed to operate over a temperature range of 20 to 300 K with a frequency range of DC to 50 GHz. Due to the vacuum and the low temperature environment, the use of microwave probes and the calibration of network analyzer measurements are somewhat elaborate. This paper presents guidelines for probe use and calibration in this environment.

• Research Organization: Sandia National Labs., Albuquerque, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 10142735
• Report Number(s): SAND-94-0575C; CONF-9405127-1; ON: DE94010089; BR: GB0103012
• Resource Relation: Conference: Atomic RF techniques spring conference,San Diego, CA (United States),27 May 1994; Other Information: PBD: [1994]
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
47 OTHER INSTRUMENTATION
SUPERCONDUCTING DEVICES
FABRICATION
SEMICONDUCTOR DEVICES
PROBES
CALIBRATION
CRYOGENICS
MICROWAVE EQUIPMENT
VACUUM SYSTEMS
FREQUENCY DEPENDENCE
TEMPERATURE DEPENDENCE
FIELD EFFECT TRANSISTORS
GALLIUM ARSENIDES
426000
440800
COMPONENTS
ELECTRON DEVICES AND CIRCUITS
MISCELLANEOUS INSTRUMENTATION