Deposition and properties of novel nitride superlattice coatings. Progress report, September 28, 1990--April 1993
We have carried out detailed studies of the processing, structure, and properties of certain polycrystalline superlattice coatings, including TiN/NbN, TiN/VN, TiN/Ni, and TiN/NiCr, which were produced using an opposed, dual-cathode, high-rate, reactive, unbalanced-magnetron sputtering system. The coatings exhibited hardness values as high as 5200 kgf/mm{sup 2} for TiN/NbN, 5100 for TiN/VN, 3500 for TiN/Ni, and 3200 for TiN/NiCr. These hardness values are all twice higher than their corresponding rule-of-mixture hardness values. The structure and properties of the coatings are a strong function of superlattice period, partial pressure of N{sub 2}, and energy and flux of ion bombardment during deposition. Possible mechanisms for hardness enhancement in the polycrystalline superlattice appear to be a result of dislocation blocking due to coherency strains, difference in dislocation line energies between layers, and small grain sizes. In response to high interest shown by industry, BIRL formed a 2-year Industrial Group Program, currently with 12 members, to transfer the superlattice coating technology.
- Research Organization:
- Northwestern Univ., Evanston, IL (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- FG02-90ER45434
- OSTI ID:
- 10139894
- Report Number(s):
- DOE/ER/45434-3; ON: DE93011532
- Resource Relation:
- Other Information: PBD: Apr 1993
- Country of Publication:
- United States
- Language:
- English
Similar Records
Deposition and properties of novel nitride superlattice coatings. Final report, May 1990--January 1996
Deposition and properties of novel nitride superlattice coatings. Progress report, 28 September 1990--October 1994