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Title: A study of the electrochemical behavior in tungsten and caustic solutions and platinum/iridium in chloride solutions, informal report

Technical Report ·
DOI:https://doi.org/10.2172/10109621· OSTI ID:10109621
;  [1];  [2]
  1. Brookhaven National Lab., Upton, NY (United States)
  2. Univ. of California, Berkeley, CA (United States). College of Engineering

Platinum/iridium and tungsten wires were electronically etched in chloride and caustic solution, respectively, to produce tips with high aspect ratio. A direct relationship between the meniscus and the aspect ratio of etched tips was established. Scanning electron micrographs indicated that higher aspect ratios were obtained by changing the geometry of the meniscus during the etch either by an increase in the applied a.c. voltage or with the addition of a nonpolar layer above the electrolytic solution during the etching process. Above the breakdown voltage, two possible mechanisms appeared to control the etching process by expediting chemical dissolution: cavitation and sparking. Cavitation caused erosion due to the force of evolved gases against the electrode and sparking attacked the surface by vaporizing the metal. Sparking commenced on both wires near 24V. This voltage corresponded to a minimum in the plot of total etch time versus voltage. From light emission studies, sparking on Pt/Ir was associated with the ionization of Pt, Ir, Ca, and Cl. A compositional analysis of insoluble black particles produced during a.c. and d.c. etching of Pt/Ir revealed Pt and Ir as the major constituents of the product. The sparking process was shown to have a potential use in micromachining.

Research Organization:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Organization:
USDOE, Washington, DC (United States)
DOE Contract Number:
AC02-76CH00016
OSTI ID:
10109621
Report Number(s):
BNL-61136; ON: DE95004951; TRN: 95:001249
Resource Relation:
Other Information: PBD: 22 Nov 1994
Country of Publication:
United States
Language:
English