Improved measurement accuracy in a Long Trace Profiler: Compensation for laser pointing instability
Laser pointing instability adds to the error of slope measurements taken with the Long Trace Profiler (LTP). As with carriage pitch error, this laser pointing error must be accounted for and subtracted from the surface under test (SUT) slope measurement. In the past, a separate reference beam (REF) allowed characterization of the component of slope error from carriage pitch. However, the component of slope error from laser pointing manifests itself differently in the SUT measured slope. An analysis of angle error propagation is given, and the effect of these errors on measured slope is determined. Then a method is proposed for identifying these errors and subtracting them from the measured SUT slope function. Separate measurements of carriage pitch and laser pointing instability isolate these effects, so that the effectiveness of the error identification algorithm may be demonstrated.
- Research Organization:
- Lawrence Berkeley Lab., CA (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 10107465
- Report Number(s):
- LBL-34603; CONF-930824-27; ON: DE94003408; TRN: 94:000812
- Resource Relation:
- Conference: Synchrotron radiation instrumentation,Gaithersburg, MD (United States),23-26 Aug 1993; Other Information: PBD: 2 Aug 1993
- Country of Publication:
- United States
- Language:
- English
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SYSTEMATIC ERROR REDUCTION: NON-TILTED REFERENCE BEAM METHOD FOR LONG TRACE PROFILER.