Controlled zone microwave plasma system
Patent
·
OSTI ID:1001786
- Knoxville, TN
- Oak Ridge, TN
An apparatus and method for initiating a process gas plasma. A conductive plate having a plurality of conductive fingers is positioned in a microwave applicator. An arc forms between the conductive fingers to initiate the formation of a plasma. A transport mechanism may convey process materials through the plasma. A spray port may be provided to expel processed materials.
- Research Organization:
- Oak Ridge Y-12 Plant (Y-12), Oak Ridge, TN (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC05-00OR22800
- Assignee:
- Babcock & Wilcox Technical Services Y-12, LLC (Oak Ridge, TN)
- Patent Number(s):
- 7,603,963
- Application Number:
- 11/415,839
- OSTI ID:
- 1001786
- Country of Publication:
- United States
- Language:
- English
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