High-resolution x-ray diffraction measurements of SiGe/Si structures

Book · Fri Sep 01 00:00:00 EDT 1995

OSTI ID:99498

Jordan-Sweet, J L; Mooney, P M; Stephenson, G B ^[1]

---

1. IBM Research Div., Yorktown Heights, NY (United States). T.J. Watson Research Center

High-resolution x-ray diffraction is an excellent probe of strain relaxation in complex SiGe structures. The high flux provided by synchrotron sources enables one to make extensive reciprocal space map measurements and evaluate many samples. The diffraction peak positions of each layer in a step-graded structure, measured for two different reflections, yield quantitative values for the relaxation and alloy composition in the layer. Grazing-incidence diffraction allows one to determine the in-plane structure of very thin layers, which have thickness-broadened peaks at conventional diffraction geometries. They demonstrate the power of these techniques with two examples.

• Research Organization: Brookhaven National Lab. (BNL), Upton, NY (United States)
• DOE Contract Number: AC02-76CH00016
• OSTI ID: 99498
• Report Number(s): CONF-941144-; ISBN 1-55899-277-4; TRN: 95:019141
• Resource Relation: Conference: Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 28 Nov - 9 Dec 1994; Other Information: PBD: 1995; Related Information: Is Part Of Applications of synchrotron radiation techniques to materials science II; Terminello, L.J. [ed.] [Lawrence Livermore National Lab., CA (United States)]; Shinn, N.D. [ed.] [Sandia National Labs., Albuquerque, NM (United States)]; Ice, G.E. [ed.] [Oak Ridge National Lab., TN (United States)]; D`Amico, K.L. [ed.] [X-ray Analytics, Ltd., Hinsdale, IL (United States)]; Perry, D.L. [ed.] [Lawrence Berkeley Lab., CA (United States)]; PB: 349 p.; Materials Research Society symposium proceedings, Volume 375
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
66 PHYSICS
GERMANIUM SILICIDES
X-RAY DIFFRACTION
LATTICE PARAMETERS
STRESS RELAXATION
SILICON
HETEROJUNCTIONS
SYNCHROTRON RADIATION
DISLOCATIONS
EXPERIMENTAL DATA