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Title: Robust design and model validation of nonlinear compliant micromechanisms.

Abstract

Although the use of compliance or elastic flexibility in microelectromechanical systems (MEMS) helps eliminate friction, wear, and backlash, compliant MEMS are known to be sensitive to variations in material properties and feature geometry, resulting in large uncertainties in performance. This paper proposes an approach for design stage uncertainty analysis, model validation, and robust optimization of nonlinear MEMS to account for critical process uncertainties including residual stress, layer thicknesses, edge bias, and material stiffness. A fully compliant bistable micromechanism (FCBM) is used as an example, demonstrating that the approach can be used to handle complex devices involving nonlinear finite element models. The general shape of the force-displacement curve is validated by comparing the uncertainty predictions to measurements obtained from in situ force gauges. A robust design is presented, where simulations show that the estimated force variation at the point of interest may be reduced from {+-}47 {micro}N to {+-}3 {micro}N. The reduced sensitivity to process variations is experimentally validated by measuring the second stable position at multiple locations on a wafer.

Authors:
 [1]; ;  [1]
  1. Brigham Young University, Provo, UT
Publication Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
990422
Report Number(s):
SAND2005-1254J
TRN: US201020%%290
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Journal Article
Journal Name:
Proposed for publication in Journal of Microelectromechanical Systems.
Additional Journal Information:
Journal Name: Proposed for publication in Journal of Microelectromechanical Systems.
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; DESIGN; MICROELECTRONIC CIRCUITS; MATHEMATICAL MODELS; VALIDATION; NONLINEAR PROBLEMS; DATA COVARIANCES; FINITE ELEMENT METHOD

Citation Formats

Howell, Larry L, Baker, Michael Sean, and Wittwer, Jonathan W. Robust design and model validation of nonlinear compliant micromechanisms.. United States: N. p., 2005. Web.
Howell, Larry L, Baker, Michael Sean, & Wittwer, Jonathan W. Robust design and model validation of nonlinear compliant micromechanisms.. United States.
Howell, Larry L, Baker, Michael Sean, and Wittwer, Jonathan W. 2005. "Robust design and model validation of nonlinear compliant micromechanisms.". United States.
@article{osti_990422,
title = {Robust design and model validation of nonlinear compliant micromechanisms.},
author = {Howell, Larry L and Baker, Michael Sean and Wittwer, Jonathan W},
abstractNote = {Although the use of compliance or elastic flexibility in microelectromechanical systems (MEMS) helps eliminate friction, wear, and backlash, compliant MEMS are known to be sensitive to variations in material properties and feature geometry, resulting in large uncertainties in performance. This paper proposes an approach for design stage uncertainty analysis, model validation, and robust optimization of nonlinear MEMS to account for critical process uncertainties including residual stress, layer thicknesses, edge bias, and material stiffness. A fully compliant bistable micromechanism (FCBM) is used as an example, demonstrating that the approach can be used to handle complex devices involving nonlinear finite element models. The general shape of the force-displacement curve is validated by comparing the uncertainty predictions to measurements obtained from in situ force gauges. A robust design is presented, where simulations show that the estimated force variation at the point of interest may be reduced from {+-}47 {micro}N to {+-}3 {micro}N. The reduced sensitivity to process variations is experimentally validated by measuring the second stable position at multiple locations on a wafer.},
doi = {},
url = {https://www.osti.gov/biblio/990422}, journal = {Proposed for publication in Journal of Microelectromechanical Systems.},
number = ,
volume = ,
place = {United States},
year = {Tue Feb 01 00:00:00 EST 2005},
month = {Tue Feb 01 00:00:00 EST 2005}
}