Laser Patterning of Diamond. Part II. Surface Nondiamond Carbon Formation and its Removal

Smedley, J; Jaye, C; Bohon, J; Rao, T; Fischer, D

doi:10.1063/1.3152995

Title: Laser Patterning of Diamond. Part II. Surface Nondiamond Carbon Formation and its Removal

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Abstract

As diamond becomes more prevalent for electronic and research applications, methods of patterning diamond will be required. One such method, laser ablation, has been investigated in a related work. We report on the formation of surface nondiamond carbon during laser ablation of both polycrystalline and single-crystal synthetic diamonds. Near edge x-ray absorption fine structure spectroscopy was used to confirm that the nondiamond carbon layer formed during the ablation was amorphous, and Fourier transform infrared absorption spectroscopy (FTIR) was used to estimate the thickness of this layer to be {approx} 60 nm. Ozone cleaning was used to remove the nondiamond carbon layer.

Authors:: Smedley, J; Jaye, C; Bohon, J; Rao, T; Fischer, D

Publication Date:: Thu Jan 01 00:00:00 EST 2009

Research Org.:: Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source

Sponsoring Org.:: Doe - Office Of Science

OSTI Identifier:: 980302

Report Number(s):: BNL-93220-2010-JA
Journal ID: ISSN 0021-8979; JAPIAU; TRN: US201015%%1687

DOE Contract Number:: DE-AC02-98CH10886

Resource Type:: Journal Article

Journal Name:: Journal of Applied Physics

Additional Journal Information:: Journal Volume: 105; Journal ID: ISSN 0021-8979

Country of Publication:: United States

Language:: English

Subject:: 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ABLATION; ABSORPTION; ABSORPTION SPECTROSCOPY; CARBON; CLEANING; DIAMONDS; FINE STRUCTURE; LASERS; OZONE; REMOVAL; SPECTROSCOPY; THICKNESS; national synchrotron light source

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                    Smedley, J, Jaye, C, Bohon, J, Rao, T, and Fischer, D. Laser Patterning of Diamond. Part II. Surface Nondiamond Carbon Formation and its Removal.  United States: N. p., 2009. 
        Web.  doi:10.1063/1.3152995.

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                    Smedley, J, Jaye, C, Bohon, J, Rao, T, & Fischer, D. Laser Patterning of Diamond. Part II. Surface Nondiamond Carbon Formation and its Removal.  United States.  https://doi.org/10.1063/1.3152995

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                    Smedley, J, Jaye, C, Bohon, J, Rao, T, and Fischer, D. 2009.  
        "Laser Patterning of Diamond. Part II. Surface Nondiamond Carbon Formation and its Removal".  United States.  https://doi.org/10.1063/1.3152995.

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@article{osti_980302,

  title        = {Laser Patterning of Diamond. Part II. Surface Nondiamond Carbon Formation and its Removal},

  author       = {Smedley, J and Jaye, C and Bohon, J and Rao, T and Fischer, D},

  abstractNote = {As diamond becomes more prevalent for electronic and research applications, methods of patterning diamond will be required. One such method, laser ablation, has been investigated in a related work. We report on the formation of surface nondiamond carbon during laser ablation of both polycrystalline and single-crystal synthetic diamonds. Near edge x-ray absorption fine structure spectroscopy was used to confirm that the nondiamond carbon layer formed during the ablation was amorphous, and Fourier transform infrared absorption spectroscopy (FTIR) was used to estimate the thickness of this layer to be {approx} 60 nm. Ozone cleaning was used to remove the nondiamond carbon layer.},

  doi          = {10.1063/1.3152995},

  url          = {https://www.osti.gov/biblio/980302},
  journal      = {Journal of Applied Physics},

  issn         = {0021-8979},

  number       = ,

  volume       = 105,

  place        = {United States},

  year         = {Thu Jan 01 00:00:00 EST 2009},

  month        = {Thu Jan 01 00:00:00 EST 2009}

}

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