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Title: Characterization and modeling of a liquid-vapor phase change membrane actuator with integrated SU-8 micro capillary wicking structure.

Abstract

A liquid-vapor phase-change membrane actuator is demonstrated which integrates an open groove wicking structure to continuously pump liquid into the heat addition region of the pressure cavity. Integration of the wick yields a higher efficiency and operating speed compared with existing thermal phase-change actuators. This improvement results from control of the liquid thickness, volume, and fill rate. An experimentally validated numerical model is presented which determines the energy budget within the actuator and investigates factors controlling efficiency such as wick thickness, thermal mass, thermal conductivity, and membrane compliance. Work to date for this class of actuators has focused primarily on steady state behavior with detailed transient analyses receiving little attention. This investigation focuses strictly on characterization of transient operation and provides a benchmark for this class of dynamic thermal actuators. The actuator presented in this work develops pressure and deflection excursions of 148 kPa and 70 {micro}m at 10 Hz while consuming 150 mW. A peak force of 1.4 N is generated during each cycle and the thermal to mechanical efficiency is 0.11%.

Authors:
 [1];  [1]; ;  [1];  [1]
  1. Washington State University
Publication Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
970185
Report Number(s):
SAND2005-2323C
TRN: US201003%%418
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the 13th International Conference on Solid-State Sensors, Actuators and Microsystems held June 6-9, 2005 in Seoul, Korea.
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; ACTUATORS; BENCHMARKS; COMPLIANCE; ECOSYSTEMS; EFFICIENCY; ENERGY BALANCE; MECHANICAL EFFICIENCY; MEMBRANES; SIMULATION; THERMAL CONDUCTIVITY; THERMAL MASS; THICKNESS; TRANSIENTS; VELOCITY

Citation Formats

Richards, R, Won, S Y, Whalen, Scott, Richards, C, and Bahr, David F. Characterization and modeling of a liquid-vapor phase change membrane actuator with integrated SU-8 micro capillary wicking structure.. United States: N. p., 2005. Web.
Richards, R, Won, S Y, Whalen, Scott, Richards, C, & Bahr, David F. Characterization and modeling of a liquid-vapor phase change membrane actuator with integrated SU-8 micro capillary wicking structure.. United States.
Richards, R, Won, S Y, Whalen, Scott, Richards, C, and Bahr, David F. 2005. "Characterization and modeling of a liquid-vapor phase change membrane actuator with integrated SU-8 micro capillary wicking structure.". United States.
@article{osti_970185,
title = {Characterization and modeling of a liquid-vapor phase change membrane actuator with integrated SU-8 micro capillary wicking structure.},
author = {Richards, R and Won, S Y and Whalen, Scott and Richards, C and Bahr, David F},
abstractNote = {A liquid-vapor phase-change membrane actuator is demonstrated which integrates an open groove wicking structure to continuously pump liquid into the heat addition region of the pressure cavity. Integration of the wick yields a higher efficiency and operating speed compared with existing thermal phase-change actuators. This improvement results from control of the liquid thickness, volume, and fill rate. An experimentally validated numerical model is presented which determines the energy budget within the actuator and investigates factors controlling efficiency such as wick thickness, thermal mass, thermal conductivity, and membrane compliance. Work to date for this class of actuators has focused primarily on steady state behavior with detailed transient analyses receiving little attention. This investigation focuses strictly on characterization of transient operation and provides a benchmark for this class of dynamic thermal actuators. The actuator presented in this work develops pressure and deflection excursions of 148 kPa and 70 {micro}m at 10 Hz while consuming 150 mW. A peak force of 1.4 N is generated during each cycle and the thermal to mechanical efficiency is 0.11%.},
doi = {},
url = {https://www.osti.gov/biblio/970185}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Apr 01 00:00:00 EST 2005},
month = {Fri Apr 01 00:00:00 EST 2005}
}

Conference:
Other availability
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