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Title: Automated and integrated mask generation from a CAD constructed 3D model.

Abstract

We have developed and implemented a method which given a three-dimensional object can infer from topology the two-dimensional masks needed to produce that object with surface micromachining. This design tool calculates the two-dimensional mask set required to produce a given three-dimensional model by investigating the vertical topology to the model. The 3D model is first separated into bodies that are non-intersecting, made from different materials or only linked through a ground plane. Next, for each body unique horizontal cross sections are located and arranged into a tree based on their topological relationship. A branch-wise search of the tree uncovers locations where deposition boundaries must lie and identifies candidate masks creating a generic mask set for the 3D model. Finally, in the last step specific process requirements are considered that may constrain the generic mask set.

Authors:
;
Publication Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
947367
Report Number(s):
SAND2005-1335C
TRN: US200909%%73
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the Nanotech 2005 : Nanoscience and Technology Institute Conference held May 8-12, 2005 in Anaheim, CA.
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; MATERIALS HANDLING EQUIPMENT; DESIGN; FABRICATION; MASKING; THREE-DIMENSIONAL CALCULATIONS; MINIATURIZATION

Citation Formats

Schiek, Richard Louis, and Schmidt, Rodney Cannon. Automated and integrated mask generation from a CAD constructed 3D model.. United States: N. p., 2005. Web.
Schiek, Richard Louis, & Schmidt, Rodney Cannon. Automated and integrated mask generation from a CAD constructed 3D model.. United States.
Schiek, Richard Louis, and Schmidt, Rodney Cannon. 2005. "Automated and integrated mask generation from a CAD constructed 3D model.". United States.
@article{osti_947367,
title = {Automated and integrated mask generation from a CAD constructed 3D model.},
author = {Schiek, Richard Louis and Schmidt, Rodney Cannon},
abstractNote = {We have developed and implemented a method which given a three-dimensional object can infer from topology the two-dimensional masks needed to produce that object with surface micromachining. This design tool calculates the two-dimensional mask set required to produce a given three-dimensional model by investigating the vertical topology to the model. The 3D model is first separated into bodies that are non-intersecting, made from different materials or only linked through a ground plane. Next, for each body unique horizontal cross sections are located and arranged into a tree based on their topological relationship. A branch-wise search of the tree uncovers locations where deposition boundaries must lie and identifies candidate masks creating a generic mask set for the 3D model. Finally, in the last step specific process requirements are considered that may constrain the generic mask set.},
doi = {},
url = {https://www.osti.gov/biblio/947367}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 01 00:00:00 EST 2005},
month = {Tue Mar 01 00:00:00 EST 2005}
}

Conference:
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