MOCVD OF YSZ COATINGS USING ?-DIKETONATE PRECURSORS
Abstract
Metallorganic chemical vapor deposition (MOCVD) was used to fabricate yttria-stabilized zirconia as a thermal barrier coating. The MOCVD precursors were Y(tmhd)3 and Zr(tmhd)4 (tmhd = 2, 2, 6, 6-tetramethyl-3, 5-heptanedianato) and delivered via aerosol assisted liquid delivery (AALD). The maximum tetragonal YSZ coating rate was 14.2 1.3 m h -1 (at 845oC) yielding a layered coating microstructure. The growth was first-order with temperature (T < 827oC) with an apparent activation energy (Ea) of 50.9 4.3 kJ mol -1. Coating efficiency was a maximum of approximately 10% at the highest growth rate.
- Authors:
-
- ORNL
- Oak Ridge National Laboratory (ORNL)
- University of Florida
- Publication Date:
- Research Org.:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). High Temperature Materials Lab. (HTML)
- Sponsoring Org.:
- FE USDOE - Office of Fossil Energy (FE)
- OSTI Identifier:
- 947127
- DOE Contract Number:
- DE-AC05-00OR22725
- Resource Type:
- Journal Article
- Journal Name:
- Journal of Alloys and Compounds
- Additional Journal Information:
- Journal Volume: 470; Journal Issue: 1-2; Journal ID: ISSN 0925-8388
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; ACTIVATION ENERGY; AEROSOLS; CHEMICAL VAPOR DEPOSITION; COATINGS; EFFICIENCY; MICROSTRUCTURE; THERMAL BARRIERS; TBC; CVD; thermal barrier coating; chemical vapor deposition; yttria-stabilized zirconia
Citation Formats
Varanasi, Venu G, Besmann, Theodore M, Hyde, Robin L., Payzant, E Andrew, and Anderson, Timothy J. MOCVD OF YSZ COATINGS USING ?-DIKETONATE PRECURSORS. United States: N. p., 2009.
Web. doi:10.1016/j.jallcom.2008.02.103.
Varanasi, Venu G, Besmann, Theodore M, Hyde, Robin L., Payzant, E Andrew, & Anderson, Timothy J. MOCVD OF YSZ COATINGS USING ?-DIKETONATE PRECURSORS. United States. https://doi.org/10.1016/j.jallcom.2008.02.103
Varanasi, Venu G, Besmann, Theodore M, Hyde, Robin L., Payzant, E Andrew, and Anderson, Timothy J. 2009.
"MOCVD OF YSZ COATINGS USING ?-DIKETONATE PRECURSORS". United States. https://doi.org/10.1016/j.jallcom.2008.02.103.
@article{osti_947127,
title = {MOCVD OF YSZ COATINGS USING ?-DIKETONATE PRECURSORS},
author = {Varanasi, Venu G and Besmann, Theodore M and Hyde, Robin L. and Payzant, E Andrew and Anderson, Timothy J},
abstractNote = {Metallorganic chemical vapor deposition (MOCVD) was used to fabricate yttria-stabilized zirconia as a thermal barrier coating. The MOCVD precursors were Y(tmhd)3 and Zr(tmhd)4 (tmhd = 2, 2, 6, 6-tetramethyl-3, 5-heptanedianato) and delivered via aerosol assisted liquid delivery (AALD). The maximum tetragonal YSZ coating rate was 14.2 1.3 m h -1 (at 845oC) yielding a layered coating microstructure. The growth was first-order with temperature (T < 827oC) with an apparent activation energy (Ea) of 50.9 4.3 kJ mol -1. Coating efficiency was a maximum of approximately 10% at the highest growth rate.},
doi = {10.1016/j.jallcom.2008.02.103},
url = {https://www.osti.gov/biblio/947127},
journal = {Journal of Alloys and Compounds},
issn = {0925-8388},
number = 1-2,
volume = 470,
place = {United States},
year = {Thu Jan 01 00:00:00 EST 2009},
month = {Thu Jan 01 00:00:00 EST 2009}
}
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