Coatings of Fe/FeAIN Thin Films
Conference
·
OSTI ID:944009
We report new results on materials properties of Fe/FeAIN thin films. Films were fabricated via a pulsed DC sputtering technique. Sputtering target materials were FeAl where x varies from 0.025 to 1. Film thickness varied from 0.01 to 4 micrometers, and particle size varied from 5 to 100 nanometers, depending on the fabrication conditions and target materials. A film with 22 layers was also fabricated via the sputtering technique. Materials properties of the films were analyzed by SEM/EDS, XRD, RBS, and ESCA (XPS).
- Research Organization:
- Pacific Northwest National Lab. (PNNL), Richland, WA (United States). Environmental Molecular Sciences Lab. (EMSL)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC05-76RL01830
- OSTI ID:
- 944009
- Report Number(s):
- PNNL-SA-53585; 15895; KP1504020; TRN: US200902%%405
- Resource Relation:
- Conference: Advanced Ceramic Coatings and Interfaces: Ceramic Engineering and Science Proceedings, 27(3):265-275
- Country of Publication:
- United States
- Language:
- English
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