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Title: Squeeze-film damping of flexible microcantilevers at low ambient pressures.

Conference ·
OSTI ID:942198

The conclusions of this presentation are: (1) The quality factors of a microcantilever under squeeze-film damping effect were calculated experimentally and theoretically. (2) The quality factors decreased with ambient pressure, but increased with resonant mode number. (3) The proposed theoretical model predicts well the quality factors of higher bending modes of a microcantilever under squeeze-film damping effect.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
942198
Report Number(s):
SAND2008-0743C; TRN: US200825%%667
Resource Relation:
Conference: Proposed for presentation at the ASME International Design Engineering Technical Conference held August 3-8, 2008 in New York, NY.
Country of Publication:
United States
Language:
English

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