Application of Vacuum Deposition Methods to Solid Oxide Fuel Cells

Journal Article · Sat Jul 01 00:00:00 EDT 2006 · Vacuum, 80(2006):1066-1083

DOI:https://doi.org/10.1016/j.vacuum.2006.01.072· OSTI ID:889050

Pederson, Larry R; Singh, Prabhakar; Zhou, Xiao Dong

The application of vacuum deposition techniques to the fabrication of solid oxide fuel cell materials and structures are reviewed, focusing on magnetron sputtering, vacuum plasma methods, laser ablation, and electrochemical vapor deposition. A description of each method and examples of use to produce electrolyte, electrode, and/or electrical interconnects are given. Generally high equipment costs and relatively low deposition rates have limited the use of vacuum deposition methods in solid oxide fuel cell manufacture, with a few notable exceptions. Vacuum methods are particularly promising in the fabrication of micro fuel cells, where thin films of high quality and unusual configuration are desired.

• Research Organization: Pacific Northwest National Lab. (PNNL), Richland, WA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC05-76RL01830
• OSTI ID: 889050
• Report Number(s): PNNL-SA-48979; VACUAV; AA2530000; TRN: US200619%%343
• Journal Information: Vacuum, 80(2006):1066-1083, Vol. 80; ISSN 0042-207X
• Country of Publication: United States
• Language: English

Related Subjects

30 DIRECT ENERGY CONVERSION
ABLATION
CONFIGURATION
DEPOSITION
FABRICATION
FOCUSING
FUEL CELLS
LASERS
MAGNETRONS
PLASMA
SOLID OXIDE FUEL CELLS
SPUTTERING
THIN FILMS
solid oxide fuel cell
SOFC
magnetron sputtering
vacuum plasma deposition
laser ablation
electrochemical vapor deposition