High-{Tc} superconducting antenna-coupled microbolometer on silicon
- National Inst. of Standards and Technology, Boulder, CO (United States). Cryoelectronic Metrology Group
A process is described for fabricating antenna-coupled resistive-edge microbolometers based on the high-{Tc} superconductor YBa{sub 2}Cu{sub 3}O{sub 7} (YBCO) on silicon. The YBCO and a buffer layer of yttria-stabilized zirconia (YSZ) were grown epitaxially on silicon to minimize excess electrical noise. A silicon-micromachined YBCO/YSZ air-bridge was incorporated to minimize the thermal conductance and the heat capacity. The thermal conductance of the air-bridge was measured to be 3 {times} 10{sup {minus}6} W/K at a temperature of 100 K. At an operating temperature of 89 K, the detector is estimated to have a response time of 2 {micro}s, a responsivity in the 1,000 V/W range, and a noise-equivalent power (NEP) in the 10{sup {minus}12} W/Hz{sup 1/2} range at 1,000 Hz.
- OSTI ID:
- 86236
- Report Number(s):
- CONF-940142-; ISBN 0-8194-1454-9; TRN: IM9534%%256
- Resource Relation:
- Conference: OE/LASE `94: conference on optics, electro-optics, and laser applications in science and engineering, Los Angeles, CA (United States), 22-29 Jan 1994; Other Information: PBD: 1994; Related Information: Is Part Of High-temperature superconducting detectors: Bolometric and nonbolometric. Proceedings SPIE Volume 2159; Nahum, M.; Villegier, J.C. [eds.]; PB: 201 p.
- Country of Publication:
- United States
- Language:
- English
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