Raman microprobe analysis of patterned high Tc superconductor (YBCO) thin films

Jimenez, J; Martin, E; Martin, P; Torres, A; Belouet, C; Chambonnet, D

doi:10.1016/0025-5408(95)00057-7

Title: Raman microprobe analysis of patterned high Tc superconductor (YBCO) thin films

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Abstract

MicroRaman spectroscopy is used for studying patterning induced structural damage in PLD (Pulsed Laser Deposition) YBaCuO High T{sub c} superconductor thin films. The study was focused on the oxygen sublattice vibrations, which give information about different structural aspects of the films. A significant oxygen loss and the presence of residual stresses for laser ablation and ion etching patterning procedures were found. No appreciable consequences at the microRaman resolution scale were detected when patterning was done by wet etching with EDTA (Ethylene Diamine Tetra Acetic Acid).

Authors:

Jimenez, J; Martin, E; Martin, P; Torres, A ^[1]; Belouet, C; Chambonnet, D ^[2]

Escuela Tecnica Superior de Ingenieros Industriales, Valladolid (Spain). Fisica de la Materia Condensada
Route de Nozay, Le Marcoussis (France). Alcatel Alsthom Recherche

Publication Date:: Thu Jun 01 00:00:00 EDT 1995

OSTI Identifier:: 82658

Resource Type:: Journal Article

Journal Name:: Materials Research Bulletin

Additional Journal Information:: Journal Volume: 30; Journal Issue: 6; Other Information: PBD: Jun 1995

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; YTTRIUM OXIDES; RAMAN SPECTROSCOPY; BARIUM OXIDES; COPPER OXIDES; SAMPLE PREPARATION; MAGNESIUM OXIDES; LASER BEAM MACHINING; MILLING; ETCHING; EDTA; STOICHIOMETRY; RESIDUAL STRESSES

Citation Formats


                    Jimenez, J, Martin, E, Martin, P, Torres, A, Belouet, C, and Chambonnet, D. Raman microprobe analysis of patterned high Tc superconductor (YBCO) thin films.  United States: N. p., 1995. 
        Web.  doi:10.1016/0025-5408(95)00057-7.

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                    Jimenez, J, Martin, E, Martin, P, Torres, A, Belouet, C, & Chambonnet, D. Raman microprobe analysis of patterned high Tc superconductor (YBCO) thin films.  United States.  https://doi.org/10.1016/0025-5408(95)00057-7

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                    Jimenez, J, Martin, E, Martin, P, Torres, A, Belouet, C, and Chambonnet, D. 1995.  
        "Raman microprobe analysis of patterned high Tc superconductor (YBCO) thin films".  United States.  https://doi.org/10.1016/0025-5408(95)00057-7.

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@article{osti_82658,

  title        = {Raman microprobe analysis of patterned high Tc superconductor (YBCO) thin films},

  author       = {Jimenez, J and Martin, E and Martin, P and Torres, A and Belouet, C and Chambonnet, D},

  abstractNote = {MicroRaman spectroscopy is used for studying patterning induced structural damage in PLD (Pulsed Laser Deposition) YBaCuO High T{sub c} superconductor thin films. The study was focused on the oxygen sublattice vibrations, which give information about different structural aspects of the films. A significant oxygen loss and the presence of residual stresses for laser ablation and ion etching patterning procedures were found. No appreciable consequences at the microRaman resolution scale were detected when patterning was done by wet etching with EDTA (Ethylene Diamine Tetra Acetic Acid).},

  doi          = {10.1016/0025-5408(95)00057-7},

  url          = {https://www.osti.gov/biblio/82658},
  journal      = {Materials Research Bulletin},
number       = 6,

  volume       = 30,

  place        = {United States},

  year         = {Thu Jun 01 00:00:00 EDT 1995},

  month        = {Thu Jun 01 00:00:00 EDT 1995}

}

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