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Title: High density arrays of micromirrors

High density arrays of micromirrors We established and achieved our goal to (1) fabricate and evaluate test structures based on the micromirror design optimized for maskless lithography applications, (2) perform system analysis and code development for the maskless lithography concept, and (3) identify specifications for micromirror arrays (MMAs) for LLNL�s adaptive optics (AO) applications and conceptualize new devices.
Authors: ; ; ; ;
Publication Date:
OSTI Identifier:OSTI ID: 8222
Report Number(s):UCRL-ID-133164
YN0100000; 97-ERD-078; ON: DE00008222
DOE Contract Number:W-7405-Eng-48
Resource Type:Technical Report
Research Org:Lawrence Livermore National Laboratory (LLNL), Livermore, CA
Sponsoring Org:USDOE Office of Defense Programs (DP)
Country of Publication:United States
Language:English
Subject: 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; Mirrors; Mirrors; Fabrication; Fabrication; Evaluation; Evaluation