Temporally resolved laser diagnostic measurements of atomic hydrogen concentrations in RF plasma discharges

Journal Article · Thu Jun 01 00:00:00 EDT 1989 · Plasma Chemistry and Plasma Processing; (USA)

DOI:https://doi.org/10.1007/BF01054278· OSTI ID:7246336

Preppernau, B L; Dolson, D A; Gottscho, R A; Miller, T A ^[1]

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1. Ohio State Univ., Columbus (USA)

Ground-state atomic hydrogen produced in radio-frequency plasma discharges (20 KHz-5 MHz) has been detected in situ using two-photon absorption laser-induced fluorescence (TALIF). Atomic ground-state concentration measurements have demonstrated excellent spatial resolution in the interelectrode gap of a planar discharge configuration with 10 nsec temporal resolution at all phases of the RF driving voltage waveform. Concentrations were measured in gas mixtures of helium and hydrogen down to 2 {times} 10{sup 13} H atoms/cm{sup 3}.

• OSTI ID: 7246336
• Journal Information: Plasma Chemistry and Plasma Processing; (USA), Vol. 9:2; ISSN 0272-4324
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
HELIUM IONS
FLUORESCENCE SPECTROSCOPY
HYDROGEN IONS
PLASMA DIAGNOSTICS
ABSORPTION
BALMER LINES
DYE LASERS
ELECTRODES
EXCITATION
EXCITED STATES
GROUND STATES
HELIUM
HIGH-FREQUENCY DISCHARGES
HYDROGEN
LASER RADIATION
LASER SPECTROSCOPY
NEODYMIUM LASERS
PHOTONS
RAMAN EFFECT
SENSITIVITY
SPATIAL RESOLUTION
TIME RESOLUTION
CHARGED PARTICLES
ELECTRIC DISCHARGES
ELECTROMAGNETIC RADIATION
ELEMENTARY PARTICLES
ELEMENTS
EMISSION SPECTROSCOPY
ENERGY LEVELS
ENERGY-LEVEL TRANSITIONS
FLUIDS
GASES
IONS
LASERS
LIQUID LASERS
MASSLESS PARTICLES
NONMETALS
RADIATIONS
RARE GASES
RESOLUTION
SOLID STATE LASERS
SPECTROSCOPY
TIMING PROPERTIES
400102* - Chemical & Spectral Procedures