Method for silicon nitride precursor solids recovery
Method and apparatus are provided for collecting reaction product solids entrained in a gaseous outflow from a reaction situs, wherein the gaseous outflow includes a condensable vapor. A condensate is formed of the condensable vapor on static mixer surfaces within a static mixer heat exchanger. The entrained reaction product solids are captured in the condensate which can be collected for further processing, such as return to the reaction situs. In production of silicon imide, optionally integrated into a production process for making silicon nitride ceramic, wherein reactant feed gas comprising silicon halide and substantially inert carrier gas is reacted with liquid ammonia in a reaction vessel, silicon imide reaction product solids entrained in a gaseous outflow comprising residual carrier gas and vaporized ammonia can be captured by forming a condensate of the ammonia vapor on static mixer surfaces of a static mixer heat exchanger. 3 figs.
- Assignee:
- Ford Motor Co., Dearborn, MI (United States)
- Patent Number(s):
- US 5171557; A
- Application Number:
- CNN: 86X-22001C; PPN: US 7-706509
- OSTI ID:
- 7205359
- Resource Relation:
- Patent File Date: 28 May 1991
- Country of Publication:
- United States
- Language:
- English
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Apparatus for silicon nitride precursor solids recovery
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Related Subjects
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
36 MATERIALS SCIENCE
PRECURSOR
CHEMICAL PREPARATION
SILICON NITRIDES
SYNTHESIS
ENTRAINMENT
VAPOR CONDENSATION
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
SILICON COMPOUNDS
400201* - Chemical & Physicochemical Properties
360201 - Ceramics
Cermets
& Refractories- Preparation & Fabrication