High rate sputter deposition of wear resistant tantalum coatings

Journal Article · Wed Jul 01 00:00:00 EDT 1992 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States)

DOI:https://doi.org/10.1116/1.577748· OSTI ID:7203777

Matson, D W; Merz, M D; McClanahan, E D ^[1]

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1. Materials Sciences Department, Pacific Northwest Laboratory, P.O. Box 999, Richland, Washington, 99352 (United States)

The refractory nature and high ductility of body centered cubic (bcc) phase tantalum makes it a suitable material for corrosion- and wear-resistant coatings on surfaces that are subjected to high stresses and harsh chemical and erosive environments. Sputter deposition can produce thick tantalum films but is prone to forming the brittle tetragonal beta phase of this material. Efforts aimed at forming thick bcc phase tantalum coatings in both flat plate and cylindrical geometries by high-rate triode sputtering methods are discussed. In addition to substrate temperature, the bcc-to-beta phase ratio in sputtered tantalum coatings is shown to be sensitive to other substrate surface effects.

• DOE Contract Number: AC06-76RL01830
• OSTI ID: 7203777
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States), Vol. 10:4; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
TANTALUM
SPUTTERING
BCC LATTICES
PROTECTIVE COATINGS
TRIODE TUBES
WEAR RESISTANCE
COATINGS
CRYSTAL LATTICES
CRYSTAL STRUCTURE
CUBIC LATTICES
ELECTRON TUBES
ELEMENTS
MECHANICAL PROPERTIES
METALS
TRANSITION ELEMENTS
360101* - Metals & Alloys- Preparation & Fabrication