Acoustic microscope surface inspection system and method

Patent · Tue Feb 26 00:00:00 EST 1991

OSTI ID:7084009

Khuri-Yakub, B T; Parent, P; Reinholdtsen, P A

An acoustic microscope surface inspection system and method are described in which pulses of high frequency electrical energy are applied to a transducer which forms and focuses acoustic energy onto a selected location on the surface of an object and receives energy from the location and generates electrical pulses. The phase of the high frequency electrical signal pulses are stepped with respect to the phase of a reference signal at said location. An output signal is generated which is indicative of the surface of said selected location. The object is scanned to provide output signals representative of the surface at a plurality of surface locations. 7 figures.

• DOE Contract Number: FG03-84ER45157
• Assignee: Leland Stanford Junior University, Stanford, CA (United States)
• Patent Number(s): US 4995259; A
• Application Number: PPN: US 7-320950
• OSTI ID: 7084009
• Resource Relation: Patent File Date: 9 Mar 1989
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
MATERIALS
ACOUSTIC MICROSCOPY
MICROSCOPES
DESIGN
BRITTLENESS
DAMAGE
MACHINING
MATERIALS TESTING
OPERATION
SURFACE PROPERTIES
MECHANICAL PROPERTIES
MICROSCOPY
TESTING
420500* - Engineering- Materials Testing