Nondestructive detection of titanium disilicide phase transformation by picosecond ultrasonics

Journal Article · Mon Nov 30 00:00:00 EST 1992 · Applied Physics Letters; (United States)

DOI:https://doi.org/10.1063/1.108114· OSTI ID:7049289

Lin, H; Stoner, R J; Maris, H J ^[1]; Harper, J M.E.; Cabral, C Jr; Halbout, J; Rubloff, G W ^[2]

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1. Department of Physics, Brown University, Providence, Rhode Island 02912 (United States)
2. IBM T. J. Watson Research Center, Yorktown Heights, New York 10598 (United States)

We demonstrate that picosecond ultrasonics is a sensitive nondestructive probe of the formation of TiSi{sub 2} from the reaction of titanium films on silicon annealed at temperatures of 300--800 {degree}C. From the measured change in optical reflectivity, the responses due to electronic excitation, acoustic echoes, and thermal coupling to the underlying Si are resolved. The results show significant differences in the electronic response and the ultrasonic echo pattern before and after the structural phases C49 and C54 TiSi{sub 2} are formed. The longitudinal sound velocity is measured to be (8.3{plus minus}0.2){times}10{sup 5} cm/s for C49 TiSi{sub 2}, and about 5% lower for the C54 phase.

• DOE Contract Number: FG02-86ER45267
• OSTI ID: 7049289
• Journal Information: Applied Physics Letters; (United States), Vol. 61:22; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
TITANIUM SILICIDES
GROWTH
ANNEALING
LASER-RADIATION HEATING
MEASURING METHODS
MONITORING
OPTICAL PUMPING
OPTICAL REFLECTION
PHASE TRANSFORMATIONS
ULTRASONIC TESTING
ACOUSTIC TESTING
HEAT TREATMENTS
HEATING
MATERIALS TESTING
NONDESTRUCTIVE TESTING
PLASMA HEATING
PUMPING
REFLECTION
SILICIDES
SILICON COMPOUNDS
TESTING
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
360601* - Other Materials- Preparation & Manufacture