Cryogenic coil for glow discharge sources

Journal Article · Wed Sep 15 00:00:00 EDT 1993 · Analytical Chemistry (Washington); (United States)

DOI:https://doi.org/10.1021/ac00066a025· OSTI ID:6975033

Ohorodnik, S K; Harrison, W W ^[1]

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1. Univ. of Florida, Gainesville, FL (United States)

The glow discharge (GD) has been developed into an analytical technique for the analysis of metals as well as nonmetals, thin films, semiconductors, insulators, and organic materials. The atomic population in the glow discharge can be measured using atomic absorption, emission, and fluorescence spectroscopic analysis while the ionic population can be sampled by mass spectometry. A common problem encountered with a glow discharge source is the presence of gaseous impurities, particularly air (N[sub 2], O[sub 2], CO[sub 2]) and water vapor commonly present in the plasma even after presputter cleaning of the source. This paper describes a cryogenic cooling coil that is incorporated with a commercial vacuum flange for direct insertion into the GD source chamber, resulting in a cooling sink adjacent to the glow discharge plasma. The cryogenic coil can be adapted to many different types of source configurations. In our laboratories, this cryogenic coil has been used primarily in a GD source on a mass spectrometer, but it has also found application on a GD source constructed for atomic absorption and atomic emission measurements. 14 refs., 4 figs., 1 tab.

• OSTI ID: 6975033
• Journal Information: Analytical Chemistry (Washington); (United States), Vol. 65:18; ISSN 0003-2700
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
36 MATERIALS SCIENCE
ALUMINIUM ALLOYS
MASS SPECTROSCOPY
ARGON
CARBON DIOXIDE
COMPILED DATA
CRYOGENICS
GLOW DISCHARGES
HYDROCARBONS
IMPURITIES
NITROGEN
WATER VAPOR
ALLOYS
CARBON COMPOUNDS
CARBON OXIDES
CHALCOGENIDES
DATA
ELECTRIC DISCHARGES
ELEMENTS
FLUIDS
GASES
INFORMATION
NONMETALS
NUMERICAL DATA
ORGANIC COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
RARE GASES
SPECTROSCOPY
VAPORS
400102* - Chemical & Spectral Procedures
360104 - Metals & Alloys- Physical Properties