Interfacial chemistry of MoS sub 2 films on Si. Annual technical report
The adhesion of thin films to their substrates is an important factor in their use in electronics, corrosion prevention, and lubrication. In particular, adhesion may be the critical parameter that determines the wear life of solid lubricant films; it has been suggested that films fail when they are pushed out of the wear track. Systems with chemical bonds across the interface will have enhanced adhesion over systems in which only van der Waals interactions are operative. Covalent materials, such as the important engineering ceramics SiC and Si3N4 and the solid lubricant MoS2, have strong directional bonds. If the same kind of bonds could be formed between such materials, a strongly adhesive lubricant-substrate system should result. The interface between rf-sputter-deposited MoS2 films and single-crystal Si was studied by observing thin (<100 A) films with electron energy loss spectroscopy, Auger electron spectroscopy, and x-ray photoelectron spectroscopy. The interface is not atomically smooth; it is a broad and chemically complex region. The surface of the native oxide (SiO2) is sulfated by the plasma. The initial MoS2 in films deposited at 220 C is chemically the same as crystalline MoS2; that is, there is no chemical bonding between the film and the substrate. There is evidence that the initial MoS2 in films deposited at 70 C is chemically bonded to the crystal, perhaps through Mo-S-O or Mo-O linkages.
- Research Organization:
- Aerospace Corp., El Segundo, CA (USA). Chemistry and Physics Lab.
- OSTI ID:
- 6952340
- Report Number(s):
- AD-A-216527/2/XAB; ATR-89(4752)-3
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
MOLYBDENUM SULFIDES
ADHESION
SOLID LUBRICANTS
SERVICE LIFE
AUGER ELECTRON SPECTROSCOPY
BONDING
CERAMICS
CHEMICAL BONDS
CHEMISTRY
CORROSION PROTECTION
CROSS-LINKING
ELECTRON SPECTROSCOPY
ELECTRONIC EQUIPMENT
FILMS
INTERFACES
LOSSES
LUBRICATION
OXIDES
PROGRESS REPORT
SILICON
SUBSTRATES
SURFACES
THIN FILMS
WEAR
CHALCOGENIDES
CHEMICAL REACTIONS
DOCUMENT TYPES
ELEMENTS
EQUIPMENT
FABRICATION
JOINING
LUBRICANTS
MOLYBDENUM COMPOUNDS
OXYGEN COMPOUNDS
POLYMERIZATION
REFRACTORY METAL COMPOUNDS
SEMIMETALS
SPECTROSCOPY
SULFIDES
SULFUR COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
360603* - Materials- Properties