Gel behavior of keV ion irradiated polystyrene

Journal Article · Mon Oct 17 00:00:00 EDT 1988 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.99939· OSTI ID:6931865

Calcagno, L; Foti, G; Licciardello, A; Puglisi, O

Among the chemical and physical modifications induced by ion bombardment of polymers, the solubility changes are very important because of technological application for lithography in microelectronic devices. Solubility changes due to the occurrence of crosslinkings have been followed on monodisperse and polydisperse polystyrene after ion irradiations (10/sup 11/--10/sup 14/ ions/cm/sup 2/, keV energy). By using the Inokuty gel theory (M. Inokuti J. Appl. Phys. 38, 2999 (1963)), the chemical yield (crosslinking/eV) has been determined for different molecular weights and molecular weight distributions.

• Research Organization: Dipartimento di Fisica, Corso Italia 57, Catania, Italy
• OSTI ID: 6931865
• Journal Information: Appl. Phys. Lett.; (United States), Vol. 53:16
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
POLYSTYRENE
CHEMICAL RADIATION EFFECTS
PHYSICAL RADIATION EFFECTS
CHEMICAL REACTIONS
FABRICATION
GELS
ION COLLISIONS
KEV RANGE
MICROELECTRONICS
MOLECULAR WEIGHT
PROTON BEAMS
SOLUBILITY
BEAMS
CHEMISTRY
COLLISIONS
COLLOIDS
DISPERSIONS
ENERGY RANGE
MATERIALS
NUCLEON BEAMS
ORGANIC COMPOUNDS
ORGANIC POLYMERS
PARTICLE BEAMS
PETROCHEMICALS
PETROLEUM PRODUCTS
PLASTICS
POLYMERS
POLYOLEFINS
POLYVINYLS
RADIATION CHEMISTRY
RADIATION EFFECTS
SYNTHETIC MATERIALS
360605* - Materials- Radiation Effects