Thin films
- Stanford Univ., CA (USA)
- International Business Machines Corp., Yorktown Heights, NY (USA). Thomas J. Watson Research Center
This book contains the papers presented at a symposium entitled Thin Films: Stresses and Mechanical Properties, held at the 1988 Fall Meeting of the Materials Research Society. The idea for this symposium originated with the growing awareness of the importance of stresses and mechanical properties in thin film technologies and the recent introduction of new experimental techniques for studying stresses and mechanical properties in thin film media. It was organized to provide the first opportunity for materials scientists and engineers interested in these and related topics to discuss recent progress in the field. Both fundamental and applied problems were discussed, and individuals from a wide spectrum of university, industrial and government laboratories participated. Materials research is predicted on an interdisciplinary approach to problem solving. In that spirit, four major areas of interest were addressed at the symposium: Testing and Measurement Techniques, Heteroepitaxy, Fracture and Related Failure Mechanisms, and Thin Film Mechanical Properties. In each, both overview and material-specific papers were presented.
- OSTI ID:
- 6910185
- Report Number(s):
- CONF-8811222-; CNN: AFOSR89-0142; ISBN: 1-55899-003-8
- Resource Relation:
- Conference: Thin films: stresses and mechanical properties, Boston, MA (USA), 28-30 Nov 1988; Related Information: Materials Research Society symposium proceedings. Volume 130
- Country of Publication:
- United States
- Language:
- English
Similar Records
Proceedings of the EMRS 2010 Summer Meeting Symposium E: Frontiers of Multifunctional Oxides (Preface)
Thin films
Related Subjects
THIN FILMS
STRESS ANALYSIS
FABRICATION
INTERFACES
LEADING ABSTRACT
MEASURING METHODS
MECHANICAL PROPERTIES
SUBSTRATES
ABSTRACTS
DOCUMENT TYPES
FILMS
360602* - Other Materials- Structure & Phase Studies
360603 - Materials- Properties
360601 - Other Materials- Preparation & Manufacture