Multilayer-coated laminar grating with 16{percent} normal-incidence efficiency in the 150-{Angstrom} wavelength region
- Naval Research Laboratory, 4555 Overlook Avenue, SW, Washington, D.C. 20375 (United States)
- Carl Zeiss Technology, P. O. Box 1369, D-73446 Oberkochen (Germany)
We characterized a laminar grating with a Mo/Si multilayer coating by using synchrotron radiation and atomic force microscopy. The grating substitute had 2400 grooves/mm, 40-{Angstrom} groove depth, and 2080-{Angstrom} groove width. The microroughness of the grating substrate was 5 {Angstrom} rms. The multilayer coating was optimized to have peak normal-incidence reflectance at a wavelength near 150 {Angstrom}. For an angle of incidence of 10{degree} the peak grating efficiency was 16.3{percent} in the +1 order and 15.0{percent} in the {minus}1 order. The efficiency in the zero order was lower by a factor of 40 owing to the excellent matching of the groove depth and groove width to the wavelength of the incident radiation. By dividing the grating efficiencies by the measured reflectance of the multilayer coating, we obtained inferred groove efficiencies of 34{percent} and 32{percent} in the +1 and {minus}1 orders, respectively. {copyright} 1997 Optical Society of America
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- DOE Contract Number:
- AC02-76CH00016
- OSTI ID:
- 678700
- Journal Information:
- Applied Optics, Vol. 36, Issue 31; Other Information: PBD: Nov 1997
- Country of Publication:
- United States
- Language:
- English
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