Thermally stable, buried high-resistance layers in [ital p]-type InP obtained by MeV energy Ti implantation
- Department of Electrical and Computer Engineering, George Mason University, Fairfax, Virginia 22030 (United States)
- Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 (United States)
High-energy Ti[sup +] ions ranging from 1 to 5 MeV were implanted into [ital p]-type InP:Zn (for two different zinc concentrations) at both room temperature and 200 [degree]C. The range statistics for Ti implanted at various energies were calculated by analyzing the as-implanted profiles determined by secondary-ion mass spectrometry. Ti did not redistribute during post-implantation annealing except for a slight indiffusion, irrespective of the implant or annealing temperatures used. This behavior is different from the behavior of other implanted transition metals (Fe and Co) in InP, which redistributed highly when the implants were performed at room temperature. In the MeV Ti-implanted InP:Zn the background Zn showed a small degree of redistribution. Rutherford backscattering measurements showed a near virgin lattice perfection for 200 [degree]C implants after annealing. Buried layers with intrinsic resistivity were obtained by MeV Ti implantation in InP:Zn ([ital p]=5[times]10[sup 16] cm[sup [minus]3]).
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 6769584
- Journal Information:
- Journal of Applied Physics; (United States), Vol. 73:11; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
SUPERCONDUCTIVITY AND SUPERFLUIDITY
36 MATERIALS SCIENCE
INDIUM PHOSPHIDES
ION IMPLANTATION
TITANIUM IONS
ANNEALING
CRYSTAL DOPING
ELECTRIC CONDUCTIVITY
MASS SPECTROSCOPY
MEV RANGE 01-10
RUTHERFORD SCATTERING
ZINC ADDITIONS
ALLOYS
CHARGED PARTICLES
ELASTIC SCATTERING
ELECTRICAL PROPERTIES
ENERGY RANGE
HEAT TREATMENTS
INDIUM COMPOUNDS
IONS
MEV RANGE
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
SCATTERING
SPECTROSCOPY
ZINC ALLOYS
665300* - Interactions Between Beams & Condensed Matter- (1992-)
360606 - Other Materials- Physical Properties- (1992-)