Phase separations of amorphous CoW films during oxidation and reactions with Si and Al
Reactions of thin Co/sub 55/ W/sub 45/ films in contact with Si(100) substrates and aluminum overlayers annealed in vacuum in the temperature ranges of 625--700 /sup 0/C and 500--600 /sup 0/C, respectively, and of thin Co/sub 55/W/sub 45/ films in air from 500 to 600 /sup 0/C were investigated by Rutherford backscattering spectrometry, glancing angle x-ray diffraction, and scanning electron microscope techniques. CoW alloy films were amorphous and have a crystallization temperature of 850 /sup 0/C on SiO/sub 2/ substrates. The compound formed is Co/sub 7/ W/sub 6/. Phase separations were found in all the reactions. A layer of cobalt compounds (CoSi/sub 2/ in Si/CoW, Co/sub 2/ Al/sub 9/ in CoW/Al, and Co/sub 3/ O/sub 4/ in CoW with air) was found to form at the reaction interfaces. In addition, a layer of mainly tungsten compounds (WSi/sub 2/ in Si/CoW, WAl/sub 12/ in CoW/Al, and WO/sub 3/ in CoW with air) was found next to cobalt compound layers, but further away from the reaction interfaces. The reactions started at temperatures comparable to those required for the formation of corresponding tungsten compounds.
- Research Organization:
- Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853
- OSTI ID:
- 6760196
- Journal Information:
- J. Appl. Phys.; (United States), Vol. 65:5
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
COBALT BASE ALLOYS
INTERFACES
OXIDATION
PHASE STUDIES
TUNGSTEN ALLOYS
ALUMINIUM
ALUMINIUM COMPOUNDS
AMORPHOUS STATE
BACKSCATTERING
COBALT COMPOUNDS
COBALT SILICIDES
CRYSTALLIZATION
HIGH TEMPERATURE
LAYERS
SCANNING ELECTRON MICROSCOPY
SILICA
SILICON
THIN FILMS
TUNGSTEN COMPOUNDS
TUNGSTEN OXIDES
VERY HIGH TEMPERATURE
X-RAY DIFFRACTION
ALLOYS
CHALCOGENIDES
CHEMICAL REACTIONS
COBALT ALLOYS
COHERENT SCATTERING
DIFFRACTION
ELECTRON MICROSCOPY
ELEMENTS
FILMS
METALS
MICROSCOPY
MINERALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
REFRACTORY METAL COMPOUNDS
SCATTERING
SEMIMETALS
SILICIDES
SILICON COMPOUNDS
SILICON OXIDES
TRANSITION ELEMENT COMPOUNDS
360102* - Metals & Alloys- Structure & Phase Studies
360105 - Metals & Alloys- Corrosion & Erosion