Gas dynamics in residual gas analyzer calibration
Abstract
Residual gas analyzers are used for measuring partial flow rates as well as for measuring partial pressures. The required calibration may also be obtained with either known flow rates or known pressures. The calibration and application procedures are straightforward when both are of the same type; however, substantial errors may occur if the two types are mixed. This report develops the basic equations required to convert between partial pressure calibrations and partial flow rate calibrations. It also discusses the question of fractionating and nonfractionating gas flow in various gas inlet and pumping systems.
- Authors:
- Publication Date:
- Research Org.:
- Process Applications, Inc., Oak Ridge, Tennessee 37830
- OSTI Identifier:
- 6720049
- Resource Type:
- Journal Article
- Journal Name:
- J. Vac. Sci. Technol., A; (United States)
- Additional Journal Information:
- Journal Volume: 5:1
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; 47 OTHER INSTRUMENTATION; GAS ANALYSIS; MEASURING INSTRUMENTS; GAS FLOW; CALIBRATION; FLOW RATE; VAPOR PRESSURE; FLUID FLOW; PHYSICAL PROPERTIES; THERMODYNAMIC PROPERTIES; 420200* - Engineering- Facilities, Equipment, & Techniques; 440300 - Miscellaneous Instruments- (-1989)
Citation Formats
Santeler, D J. Gas dynamics in residual gas analyzer calibration. United States: N. p., 1987.
Web. doi:10.1116/1.574125.
Santeler, D J. Gas dynamics in residual gas analyzer calibration. United States. https://doi.org/10.1116/1.574125
Santeler, D J. 1987.
"Gas dynamics in residual gas analyzer calibration". United States. https://doi.org/10.1116/1.574125.
@article{osti_6720049,
title = {Gas dynamics in residual gas analyzer calibration},
author = {Santeler, D J},
abstractNote = {Residual gas analyzers are used for measuring partial flow rates as well as for measuring partial pressures. The required calibration may also be obtained with either known flow rates or known pressures. The calibration and application procedures are straightforward when both are of the same type; however, substantial errors may occur if the two types are mixed. This report develops the basic equations required to convert between partial pressure calibrations and partial flow rate calibrations. It also discusses the question of fractionating and nonfractionating gas flow in various gas inlet and pumping systems.},
doi = {10.1116/1.574125},
url = {https://www.osti.gov/biblio/6720049},
journal = {J. Vac. Sci. Technol., A; (United States)},
number = ,
volume = 5:1,
place = {United States},
year = {Thu Jan 01 00:00:00 EST 1987},
month = {Thu Jan 01 00:00:00 EST 1987}
}
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