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Title: Nonlinear effect on surface charging by diatomic ion bombardment

Journal Article · · Journal of Applied Physics; (USA)
DOI:https://doi.org/10.1063/1.346776· OSTI ID:6704390
 [1]
  1. Toyota Central Research and Development Laboratories, Inc., Nagakute, Aichi 480-11 (Japan)

Surface charging by ion bombardment is investigated using a quasistable charging condition in which one can evaluate the degree of charging by an intensity of secondary ions. It is found that a nonlinear effect on the charging occurred under monoatomic and diatomic ion bombardments. Namely, O{sup +}{sub 2} -ion irradiation enhances the charging in comparison with O{sup +}-ion irradiation, although atomic dose and energy/atom are kept the same in both ion bombarbments. Since the results also show that the surface charging is suppressed when the energy of incident ions is higher, the nonlinear effect by diatomic ion irradiation is attributed not to an increase of energy density, but to a dense cascade in the overlapping region of cascades caused by two constituents of the incoming diatom.

OSTI ID:
6704390
Journal Information:
Journal of Applied Physics; (USA), Vol. 68:2; ISSN 0021-8979
Country of Publication:
United States
Language:
English