Disilane versus monosilane: a comparison of the properties of glow-discharge a-Si:H films and solar cells

Conference · Fri Jan 01 00:00:00 EST 1982

OSTI ID:6669281

Delahoy, A E; Kampas, F J; Corderman, R R; Vanier, P E; Griffith, R W

The consequences of using disilane instead of silane for the glow-discharge deposition of a-Si:H solar cells have been studied. Deposition rates were increased fivefold by the use of disilane. The a-Si:H films have a higher hydrogen content, but otherwise are quite similar to silane produced films and possess the same type of gap states. Chlorosilanes, HCl, and oxysilanes were detected in the disilane by mass spectrometry and their influence on film and solar cell properties assessed. The problem of inadvertent dopant tails resulting from the higher deposition rate of the solar cells is identified.

• Research Organization: Chronar Corp., Princeton, NJ (USA); Brookhaven National Lab., Upton, NY (USA); Army Research Office, Research Triangle Park, NC (USA)
• DOE Contract Number: AC02-76CH00016
• OSTI ID: 6669281
• Report Number(s): BNL-32046; CONF-820906-36; ON: DE83002841
• Resource Relation: Conference: 16. IEEE photovoltaics specialists conference, San Diego, CA, USA, 28 Sep 1982
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
SILANES
GLOW DISCHARGES
SILICON
ELECTRICAL PROPERTIES
SILICON SOLAR CELLS
AMORPHOUS STATE
CURRENT DENSITY
ELECTRIC POTENTIAL
EMISSION SPECTRA
ENERGY-LEVEL DENSITY
EXPERIMENTAL DATA
FILMS
IMPURITIES
MASS SPECTROSCOPY
PHOTOCONDUCTIVITY
QUANTUM EFFICIENCY
SPECTRAL RESPONSE
TEMPERATURE DEPENDENCE
DATA
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTRIC CONDUCTIVITY
ELECTRIC DISCHARGES
ELEMENTS
EQUIPMENT
HYDRIDES
HYDROGEN COMPOUNDS
INFORMATION
NUMERICAL DATA
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
SEMIMETALS
SILICON COMPOUNDS
SOLAR CELLS
SOLAR EQUIPMENT
SPECTRA
SPECTROSCOPY
140501* - Solar Energy Conversion- Photovoltaic Conversion