Electron-beam-enhanced oxidation processes in II-VI compound semiconductors observed by high-resolution electron microscopy
Enhanced oxidation of ZnS and ZnSe semiconductor surfaces has been observed in situ during electron irradiation in a high-resolution electron microscope. The phase present at the surface region has been identified as ZnO by optical diffractogram and selected area electron diffraction techniques. For ZnS oxidation, both hexagonal ZnO having a random orientation and cubic ZnO in perfect epitaxial relationship with the bulk ZnS were observed. Enhanced oxidation of ZnSe to ZnO has also been observed under electron beam irradiation. However, only the hexagonal form was observed. The oxidation rates for both ZnS and ZnSe depended on electron flux but was independent of orientation. A model in which the oxidation process is limited by diffusion through the oxide film is proposed. By electron irradiation the diffusion rate is enhanced presumably by a nonthermal process.
- Research Organization:
- Northwestern Univ., Evanston, IL (USA). Dept. of Materials Science and Engineering
- OSTI ID:
- 6622182
- Report Number(s):
- AD-A-222206/5/XAB; CNN: AFOSR-86-0344
- Resource Relation:
- Other Information: Pub. in Jnl. of Applied Physics, Vol. 67, No. 3, 1535-1541(1 Feb 1990)
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ZINC SELENIDES
PHYSICAL RADIATION EFFECTS
ZINC SULFIDES
DIFFUSION
ELECTRON BEAMS
ELECTRON DIFFRACTION
ELECTRON MICROSCOPES
ELECTRON MICROSCOPY
EPITAXY
FILMS
IRRADIATION
ORIENTATION
OXIDATION
OXIDES
RESOLUTION
SEMICONDUCTOR MATERIALS
SURFACES
ZINC OXIDES
BEAMS
CHALCOGENIDES
CHEMICAL REACTIONS
COHERENT SCATTERING
DIFFRACTION
INORGANIC PHOSPHORS
LEPTON BEAMS
MATERIALS
MICROSCOPES
MICROSCOPY
OXYGEN COMPOUNDS
PARTICLE BEAMS
PHOSPHORS
RADIATION EFFECTS
SCATTERING
SELENIDES
SELENIUM COMPOUNDS
SULFIDES
SULFUR COMPOUNDS
ZINC COMPOUNDS
360605* - Materials- Radiation Effects