Submicron, soft x-ray fluorescence imaging

Journal Article · Mon Jan 16 00:00:00 EST 1995 · Applied Physics Letters; (United States)

DOI:https://doi.org/10.1063/1.113518· OSTI ID:6619776

La Fontaine, B; MacDowell, A A; Tan, Z ^[1]; White, D L; Taylor, G N ^[2]; Wood, II, O R; Bjorkholm, J E; Tennant, D M ^[3]; Hulbert, S L ^[4]

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1. AT T Bell Laboratories, 510E Brookhaven National Laboratory, Upton, New York 11973 (United States)
2. AT T Bell Laboratories, Murray Hill, New Jersey 07974 (United States)
3. AT T Bell Laboratories, Holmdel, New Jersey 07733 (United States)
4. National Synchrotron Light Source, 725D Brookhaven National Laboratory, Upton, New York 11973 (United States)

Submicron fluorescence imaging of soft x-ray aerial images, using a high resolution fluorescent crystal is reported. Features as small as 0.1 [mu]m were observed using a commercially available single-crystal phosphor, STI-F10G (Star Tech Instruments Inc. P. O. Box 2536, Danbury, CT 06813-2536), excited with 139 A light. Its quantum efficiency was estimated to be 5--10 times that of sodium salicylate and to be constant over a broad spectral range from 30 to 400 A. A comparison with a terbium-activated yttrium orthosilicate fluorescent crystal is also presented. Several applications, such as the characterization of the aerial images produced by deep ultraviolet or extreme ultraviolet lithographic exposure tools, are envisaged.

• OSTI ID: 6619776
• Journal Information: Applied Physics Letters; (United States), Vol. 66:3; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
X-RAY FLUORESCENCE ANALYSIS
MICROSCOPY
MONOCRYSTALS
PHOSPHORS
SOFT X RADIATION
SPATIAL RESOLUTION
CHEMICAL ANALYSIS
CRYSTALS
ELECTROMAGNETIC RADIATION
IONIZING RADIATIONS
NONDESTRUCTIVE ANALYSIS
RADIATIONS
RESOLUTION
X RADIATION
X-RAY EMISSION ANALYSIS
400101* - Activation
Nuclear Reaction
Radiometric & Radiochemical Procedures