Reactive evaporation of anomalous blue VO/sub 2/
Thin films of vanadium dioxide exhibit a thermally induced semiconductor-to-metal phase transition near 67/sup 0/ C. In most deposition conditions, the transition is accompanied by large changes in optical properties at infrared wavelengths, but with only slight visible contrast. Recently, reactive evaporation at high temperatures and in stringent process conditions of so-called blue VO/sub 2/ has been reported (G. A. Nyberg and R. A. Buhrman, J. Vac. Sci. Technol. A 2, 301 (1984)). These films exhibit a striking blue-to-red transition in transmitted light. In this paper, a new technique for thin-film growth of anomalous vanadium dioxide will be presented. The primary steps in the process are the reactive evaporation of vanadium oxide at ambient temperature followed by anneal in flowing oxygen. Optical and microstructural data for material deposited on sapphire and fused quartz substrates will be compared to standard vanadium oxide.
- Research Organization:
- LTV Aerospace and Defense Company, Vought Missiles and Advanced Programs Division, P.O. Box 650003, Dallas, Texas 75265-0003
- OSTI ID:
- 6616096
- Journal Information:
- Appl. Opt.; (United States), Vol. 26:8
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
VANADIUM OXIDES
OPTICAL PROPERTIES
VACUUM EVAPORATION
ANNEALING
CHEMICAL REACTION KINETICS
CRYSTAL-PHASE TRANSFORMATIONS
LIGHT TRANSMISSION
MICROSTRUCTURE
THERMODYNAMIC PROPERTIES
THIN FILMS
CHALCOGENIDES
CRYSTAL STRUCTURE
EVAPORATION
FILMS
HEAT TREATMENTS
KINETICS
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
REACTION KINETICS
TRANSITION ELEMENT COMPOUNDS
VANADIUM COMPOUNDS
360202* - Ceramics
Cermets
& Refractories- Structure & Phase Studies
360204 - Ceramics
Cermets
& Refractories- Physical Properties